| resin | metal | Brittle material | ||
| Material | Polyimide Polyether Nether Polybenzoine Diesel Polyacetal Polyamide |
Stainless steel aluminum brass rare metal (Titan, Tantal, Platinum, etc.) |
Machinable ceramics quartz glass silicon zirconia alumina |
|
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Minimum diameter / φDμm | φ10μm | φ10μm | φ30μm |
| depth | ~φ100μm=5D φ100μm~=10D |
~φ100μm=5D φ100μm~=10D |
~φ100μm=5D φ100μm~=10D |
|
|
Minimum width / Wμm | 10μm | 10μm | 30μm |
| width | ~100μm=2W 100μm~=5W |
~100μm=2W 100μm~=5W |
~100μm=2W 100μm~=5W |
|
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